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The ATH-M series are hybrid magnetically levitated turbo pumps. These very sophisticated high performance and extremely robust pumps are recognized as the new reference in the world of large turbomolecular pumps. The ATH-M magnetically levitated turbo pumps are clean and dry. Because of the magnetic bearings the units are frictionless, do not require any grease, are maintenance free and can run for years without any interruption on a clean process. This relates to a significant lower cost of ownership.

Features
• Automatic 5-Axis balancing
• Maintenance-free
• Low cost of ownership
• Minimum Vibration
• Turbo accepts 5 landings at full speed

  KYKY
  Osaka
  Osaka Magnetically Suspended
  Alcatel Adixen
  Alcatel Adixen Maglev Hybrid
  Edwards
  Edwards Seiko Seiki
  Oerlikon Leybold
  Oerlikon Leybold MAG
  Pfeiffer
  Pfeiffer Magnetic Bearing
  Varian
  TYH Turbo Pumps
  Instant Systems
  Gauging
  Helium Leak Detector
  Mass Spectrometry
  Oil-Free Backing Pumps
  Hardware
  Turbo Repair Kits 
                and Manuals
  Turbo Services
  Controller 
                Services

Technical Specifcations

	ATH400M	ATH500M	ATH1300M	ATH1600M	ATH2300M	ATH2800M	ATH3200M
Inlet Flange
	IS0 100 CF 100 ISO 160 CF 160	IS0 160 CF 160 ISO 160 CF 160	IS0 160 CF 160 ISO 200 CF 200	IS0 200 CF 200 ISO 250 CF 250	IS0 200 CF 200 ISO 250 CF 250	ISO 250	ISO 320
Pumping Speed, L/S
Nitrogen Helium Hydrogen	410 360 230	500 340 190	1250 850 550	1500 1150 750	2100 2200 1200	2050 2150 1750	2600 2400 1800
Compression Ratio
Nitrogen Helium Hydrogen	10/7 10/3 10/2	10/6 10/7 10/4	10/7 10/3 10/2	10/7 10/3 10/2	10/9 10/4 10/3	10/8 10/3 10/4	10/8 10/3 10/4
Ultimate Pressure (mbar)
	10 - 9	10 - 7	10 - 9	10 - 9	10 - 9	10 - 8	10 - 8
Startup Time (min)
	3	3	5	6	10	10	10
Vibration Level
	0.01	0.01	0.01	0.01	0.01	0.01	0.01
Orientation
	Any	Any	Any	Any	Any	Vertical	Vertical
Backing Pressure (mbar)
	10 - 2	2	10 - 2	10 - 2	10 - 2	1.5	1.5
Outlet Flange
	NW40	NW25	NW40	NW40	NW40	NW40	NW40
Weight (lb)
	42	37	75	78	102	176	176
Price
	$12,600.00	$21,300.00	$31,500.00	$37,320.00	$46,960.00	$50,300.00	$51,300.00
Controller
	ACT600M	ACT500	ACT1300M	ACT1300M	MAG POWER	MAG POWER	MAG POWER
Price
	$3,970.00	N/A	$8,520.00	$8,520.00	$10,300.00	$10,300.00	$10,300.00

The ACT M maglev turbo pump controllers are compact and have highly effective electronic monitoring. They are especially designed for the ATH-M turbo pumps. Standard features include convenient interface, handy keyboard, digital display for reading rotational speed, pump current consumption, pump and controller temperatures, and complete automatic balancing system. Remote interface available through input/output connections and each unit has RS232/RS485 configuration. Inputs include; pump start-stop, standby, and interlock. Any controller can be switched without a need for tuning or adjustment.

Ordering Information

	ATH400M	ATH500M	ATH1300M	ATH1600M	ATH2300M	ATH2800M	ATH3200M
Turbo Pump Systems ISO
Air Cooling Water Cooling	D23121 D24121	V2412100	M2462100 M2562100	P2512100 P2612100	Q2512100 Q2612100	U2662100	U2662100
Turbo Pump Systems CF
Air Cooling Water Cooling	D23221 D24221	V2422100	M2422100 M2522100	P2522100 P2622100	Q2522100 Q2612100
Controller
	102539	114866	112123	112123	109015	114679	114679
Pump Cable (3.5m)
	103719		103719	103719	103719	A215300-035-C6-D	A215300-035-C6-D
Power Cord
	802366	A3 31 3 28-035	802366	802366	802366	802366	802366
Inlet Screen
ISO CF	056844 056942 056845 056928	114438 114437	107747 108872 107747 108872	107747 108872 107747 108872	109200 109199 109200 109199	Included	Included

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