EBARA Magnetically Levitated Turbo Pumps

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The units offer a wide pressure range with maximum back pressure up to 3 Torr.

Temperature controlled models can be offered to reduce the rate of condensation byproduct and process effluent build up.  The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

The Ultra high vacuum model pumps efficiently evacuate the lightest gases from high vacuum down to the ultra high vacuum region by reducing the materials' out gassing and improving the efficiency of hydrogen compression.
If require the Ultra low vibration model turbo pumps produce less than 1nm vibration amplitude.

Features
• Full Magnetic Bearing
• Installation in Any Orientation
• Automatic Calibration
• Rotational Speed Control
• Vibration Free
•Safety Standards UL, CE, SEMI, NRTL
Technical Specifications
  EMT390M EMT420M EMT900M EMT1300M EMT2400M EMT3260
Inlet Flange
 
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200
ISO 250
CF 250
ISO 320
CF 320
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
340
290
N/A
400
300
N/A
900
1050
N/A
1300
1200
N/A
2400
1100
N/A
3200
3000
2700
Ultimate Pressure (mbar)
 
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
10 - 9
Startup Time (min)
 
2
3
4
5
5
-
Orientation
 
Any
Any
Any
Any
Any
Any
Backing Pressure (mbar)
 
3
3
3
3
2
3
Outlet Flange
 
NW25
NW25
NW40
NW40
NW40
NW40
Weight (lb)
 
31
31
77
77
105
176
Controller
 
ETC011M
ETC011M
ETC011M
ETC011M
ETC011M
ETC020M
Complete System Price
 
$23,500.00
$24,900.00
$29,900.00
$32,500.00
$42,500.00
$45,600.00

Ordering Information
  EMT390M EMT420M EMT900M EMT1300M EMT2400M EMT3260
Turbo Pump Systems ISO
Air Cooling
Water Cooling
EMT390MBAB
EMT390MBWB
EMT420MBAB
EMT420MBWB
EMT900MBAB
EMT900MBWB
EMT1300MBAB
EMT1300MBWB
EMT2400MBAB
EMT2400MBWB
EMT2400MBAB
EMT2400MBWB
Turbo Pump Systems CF
Air Cooling
Water Cooling
EMT390MCAB
EMT390MCWB
EMT420MCAB
EMT420MCWB
EMT900MCAB
EMT900MCWB
EMT1300MCAB
EMT1300MCWB
EMT2400MCAB
EMT2400MCWB
EMT3260MCAB
EMT3260MCWB