Contact Turbo Vacuum
Edwards
Edwards STP Magnetically Levitated
Turbo Pumps

The first STP magnetically levitated turbo pumps were sold in 1983 worldwide. Today the STP turbo pumps account for 85% of the semiconductor and process tool market with 80,000 units sold. They demonstrate exceptional levels of reliability, class leading performance, and low cost of ownership on the harshest applications. The STP pumps are the first choice for application demanding high up time, hydrocarbon-free pumping, minimal maintenance and low vibration. The use of magnetically levitated bearings eliminate the risk of contamination, while ensuring the units resist rapid changes in gas throughput and mechanical shock.

Features
• Proven Reliability
• Clean Oil-Free Vacuum
• Complete Range 300 – 2650 L/S
• 5 Axis Auto Tuning
• Installation In Any Orientation
• Full Remote Control Interface
• Includes Inlet Screen and Water Cooling
• Low Noise and Vibration
• Virtually Maintenance Free

  KYKY
  Osaka
  Osaka Magnetically Suspended
  Alcatel Adixen
  Alcatel Adixen Maglev Hybrid
  Edwards
  Edwards STP Magnetic Bearing
  Oerlikon Leybold
  Oerlikon Leybold MAG
  Pfeiffer
  Agilent
  EBARA Magnetically Levitated
  TYH Turbo Pumps
  vCUBE, Vari & Instant Systems
  vCART
  Gauging
  Helium Leak Detector
  Mass Spectrometry
  Oil-Free Backing Pumps
  Hardware
  Turbo Repair Kits and Manuals
  Turbo & Controller Services
  Upload Turbo Picture

Technical Specifications
  STPIX455 STP301/301C STP451/451C STP603/603C STPA803C STPA1303C STPA2203C STPXA2703C
Inlet Flange
 
ISO 100
CF 100
ISO 160
CF 160
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200

ISO250
CF 250
ISO 250
CF 250
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
450
N/A
460
300

300
440
420
275
650
N/A
550
800
N/A
520
1300
N/A
800
2200
N/A
1700
2650
N/A
2050
Compression Ratio
Nitrogen
Helium
Hydrogen
10/3
N/A
10/4
10/8
N/A
2 x 10/4
10/8
5 x 10/5
2 x 10/4
10/8
N/A
10/5
10/8
N/A
10/3
10/8
N/A
10/3
10/8
N/A
10/4
10/8
N/A
10/3
Ultimate Pressure (mbar)
 
10 - 8
10 - 10
10 - 10
10 - 10
10 - 9
10 - 9
10 - 9
10 - 8
Startup Time (min)
 
6
3
6
3
7
7
7
8
Rotational Speed (rpm)
 
55,000
48,000
48,000
35,000
32,500
32,500
27,000
27,500
Orientation
 
Any
Any
Any
Any
Any
Any
Any
Any
Backing Pressure (mbar)
 
0.1
0.1
0.1
0.1
0.1
0.1
0.1
0.1
Outlet Flange
 
NW25
NW25
NW25
NW40
NW40
NW40
NW40
NW40
Weight (lb)
 
33
24
53
69
86
86
134
69
Price
 
$22,000.00
$15,910.00
$18,115.00
$22,940.00
$24,415.00
$30,190.00
$38,800.00
$25,800.00
Controller
 
IPS-240
301-451
301-451
SCU-800
SCU-800
SCU-800
SCU-1600
SCU-1600
Price
 
$2,920.00
$8,400.00
$10,450.00
$10,450.00
$10,450.00
$10,450.00
$20,600.00
$50,000.00

SCU Turbo Pump Controller

The SCU turbo pump control unit is a fully digital controller, and has perfect compatibility with the magnetically levitated turbo pumps. The new AVR, Auto vibration reduction, technology achieves a further reduction in vibration levels, and the advanced pre-maintenance call function provides advanced notice of precise maintenance time.

Features
• Universal Controller
• Rotor Imbalance Monitoring
• Back-Up Bearing Daming Monitoring
• Highest Reliability
• Communication Ports
Ordering Information
  STPIX455 STP301/301C STP451/451C STP603/603C STPA803C STPA1303C STPA2203C STPXA2703C
Turbo Pump
ISO Inlet
CF Inlet
ISO Inlet
CF Inlet
PT64-02-010
PT64-02-050
PT64-02-020
PT64-02-060
B748-30-020
B748-31-010

B748-40-030
B748-41-010
YT 39B0030
YT 3902005
YT 36B0040
YT 36B0010
YT 36B0120
YT 36B0030
YT 46B0030
YT 46B0010
PT660Z140
Controller
 
PT64-W0-200
B748-10-030
B748-10-030
B748-10-030
B748-10-030
B748-10-030
YT 49Z2200
PT59-20-200
Pump Cable (3.5m)
 
PT64-Y0-B20
B707-00-010
B751-30-050
B751-30-020
B751-30-020
B751-30-020
B751-30-020
PT35-Y0-B01
Power Cord
 
PT64-Y0-A10
B707-00-090
PT46-Y0-A01
B707-00-090
PT46-Y0-A01
PT46-Y0-A01
B750-30-020
N/A

Home • KYKY • Osaka • Osaka Magnetically Suspended • Alcatel Adixen • Alcatel Adixen Maglev Hybrid • Edwards • Edwards STP Magnetic Bearing
Oerlikon Leybold • Oerlikon Leybold MAG • Pfeiffer • Agilent • EBARA Magnetically Levitated • TYH Turbo Pumps • vCUBE, Vari & Instant Systems
vCART • Gauging • Helium Leak Detector • Mass Spectrometry • Oil-Free Backing Pumps • Hardware • Turbo Repair Kits and Manuals
Turbo & Controller Services • Upload Turbo Picture • Contact Us
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