Oerlikon Leybold MAG Turbo Pumps

The world-wide success of the TURBOVAC MAG product line results from more than 30 years of experience of Oerlikon Leybold in development and manufacturing of turbomolecular pumps with magnetically levitated rotors.  In 1976 they introduced the 560M turbo.  This was the first magnetically levitated turbo which became commercially available.  Most of the MAG turbo pumps are designed with five axes active bearings.  The rotor position is actively controlled by electromagnets in all five degrees of freedom.   The MAG turbo pumps are designed for numerous applications including; semiconductor processes, CVD, PVD, ion implantation, electron beam microscopy, and areas where corrosive gases are evacuated.  The new MAG W 300iP/400iP/600iP, integrate a state-of-the-art converter with RS232/RS485 for bearing & drive system, eliminating the need for a convention bench-top controller solution and interconnecting cable.

Features
• 5 Axis magnetic bearing drive system
• Maintenance free systems
• High performance in any orientation
• High degree of operating reliability
• Extremely low vibration and noise
• Designed for pumping of corrosive gases