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Seiko Seiki Magnetically Levitated Turbo Pumps Seiko Seiki turbo pump manufactures are leaders in clean and dry vacuum technology. The first STP pumps were sold in 1983 world-wide. Seiko Seiki now owned by Edwards is predominately used in the semiconductor market and process tools where they demonstrate exceptional levels of reliability on the harshest applications. STP pumps are the first choice for applications demanding high up time, hydrocarbon-free pumping, minimal maintenance and low vibration. Seiko Seiki turbo pumps use magnetically levitated bearings which eliminate the risk of contamination. This technology ensures that STP pumps are resistant to rapid changes in gas throughput and mechanical shock.
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| Technical Specifcations |
| STPIX455 | STP301/301C | STP451/451C | STP603/603C | STPA803C | STPA1303C | STPA2203C | STPXA2703C | |
| Inlet Flange | ||||||||
ISO 100 CF 100 ISO 160 CF 160 |
ISO 100
CF 100 |
ISO 160
CF 160 |
ISO 160
CF 160 |
ISO 160 CF 160 |
ISO 200 CF 200 |
ISO250 CF 250 |
ISO
250 CF 250 |
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| Pumping Speed, L/S | ||||||||
| Nitrogen Helium Hydrogen |
450 N/A 460 |
300 300 |
440 420 275 |
650 N/A 550 |
800 N/A 520 |
1300 N/A 800 |
2200 N/A 1700 |
2650 N/A 2050 |
| Compression Ratio | ||||||||
| Nitrogen Helium Hydrogen |
10/3 N/A 10/4 |
10/8 N/A 2 x 10/4 |
10/8 5 x 10/5 2 x 10/4 |
10/8 N/A 10/5 |
10/8 N/A 10/3 |
10/8 N/A 10/3 |
10/8 N/A 10/4 |
10/8 N/A 10/3 |
| Ultimate Pressure (mbar) | ||||||||
10 - 8 |
10 - 10 |
10 - 10 |
10 - 10 |
10 - 9 |
10 - 9 |
10 - 9 |
10 - 8 |
|
| Startup Time (min) | ||||||||
6 |
3 |
6 |
3 |
7 |
7 |
7 |
8 |
|
| Rotational Speed (rpm) | ||||||||
55,000 |
48,000 |
48,000 |
35,000 |
32,500 |
32,500 |
27,000 |
27,500 |
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| Orientation | ||||||||
Any |
Any |
Any |
Any |
Any |
Any |
Any |
Any |
|
| Backing Pressure (mbar) | ||||||||
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
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| Outlet Flange | ||||||||
NW25 |
NW25 |
NW25 |
NW40 |
NW40 |
NW40 |
NW40 |
NW40 |
|
| Weight (lb) | ||||||||
33 |
24 |
53 |
69 |
86 |
86 |
134 |
69 |
|
| Price | ||||||||
$22,000.00 |
$15,910.00 |
$18,115.00 |
$22,940.00 |
$24,415.00 |
$30,190.00 |
$38,800.00 |
$25,800.00 |
|
| Controller | ||||||||
IPS-240 |
SCU-350 |
SCU-750 |
SCU-750 |
SCU-750 |
SCU-750 |
SCU-1500 |
SCU-1500 |
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| Price | ||||||||
$2,920.00 |
$8,400.00 |
$10,450.00 |
$10,450.00 |
$10,450.00 |
$10,450.00 |
$20,600.00 |
$50,000.00 |
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 SCU Turbo Pump ControllerThe Seiko Seiki SCU turbo pump control unit is a fully digital controller, and has perfect compatibility with the magnetically levitated turbo pumps. The new AVR, Auto vibration reduction, technology achieves a further reduction in vibration levels, and the advanced pre-maintenance call function provides advanced notice of precise maintenance time. Features • Universal Controller • Auto Vibration Reduction • Auto Balancing System • Highest Reliability • Communication Ports |
| Ordering Information |
| STPIX455 | STP301/301C | STP451/451C | STP603/603C | STPA803C | STPA1303C | STPA2203C | STPXA2703C | |
| Turbo Pump | ||||||||
| ISO Inlet CF Inlet ISO Inlet CF Inlet |
PT64-02-010 PT64-02-050 PT64-02-020 PT64-02-060 |
B748-30-020 B748-31-010 |
B721-02-101 B721-02-040 |
B748-40-030 B748-41-010 |
B718-01-000 B718-05-010 |
B718-02-020 B718-03-000 |
PT4V-02-002 PT4V-02-003 |
PT660Z140 |
| Controller | ||||||||
PT64-W0-200 |
B748-10-030 |
PT56-20-200 |
PT56-20-200 |
PT56-20-200 |
PT56-20-200 |
PT59-20-200 |
PT59-20-200 |
|
| Pump Cable (3.5m) | ||||||||
PT64-Y0-B20 |
B707-00-010 |
B751-30-050 |
B707-00-010 |
PT51-30-050 |
PT51-30-050 |
PT50-30-050 |
PT35-Y0-B01 |
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| Power Cord | ||||||||
PT64-Y0-A10 |
B707-00-090 |
PT46-Y0-A01 |
B707-00-090 |
PT46-Y0-A01 |
PT46-Y0-A01 |
B750-30-020 |
N/A |
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