Varian Turbo Pumps

Varian’s V-Pumps offers a full line of turbomolecular pumps and controllers optimized for the specific requirements of high vacuum needs from 70 -6000 liters a second. Maximizing performance at minimum cost and size is there design mission. Varian can customize its pumps by providing multi-inlet pumping systems that are compact and reliable. Varian engineers are experts in creating and maintaining diverse high vacuum processes with innovative application design and accessories. Choose from a wide range of equipment.

Features
• State-of-the-Art MacroTorr Technology
• Designed for Very High Gas Load Operations
• Monolithic Rotors
• Highly Reliable
• Maintenance-Free Ceramic Ball Bearings
• High Speed, High Compression
• On Board Controller with Windows based Software

Technical Specifcations
  V81-T V81-M V301 V551 V701 V1001 V3K-T
Inlet Flange
 
NW 40
ISO 63
CF 63
NW 40
ISO 63
CF 63
ISO 100
CF 100
ISO 160
CF 160
ISO 100
CF 100
ISO 160
CF 160
ISO 200
CF 200
ISO 200
CF 200
ISO 250
ISO 250
CF 250
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
77
65
50
77
65
50
280
230
210
550
600
510
690
620
510
1050
900
920
2050
2400
2300
Compression Ratio
Nitrogen
Helium
Hydrogen
7 x 10/8
3 x 10/3
3 x 10/2

5 x 10/8
8 x 10/4
7 x 10/3
7 x 10/8
1 x 10/5
1 x 10/4
1 x 10/9
1 x 10/7
1 x 10/6
1 x 10/9
1 x 10/7
1 x 10/6
1 x 10/9
5 x 10/7
2 x 10/6
1 x 10/9
1 x 10/5
2 x 10/4
Ultimate Pressure (mbar)
 
10 - 9
10 - 9
10 - 10
10 - 10
10 - 10
10 - 10
10 - 9
Startup Time (min)
 
1
1
3
5
5
4
9
Rotational Speed (rpm)
 
80,000
80,000
56,000
42,000
42,000
38,000
31,000
Orientation
 
Any
Any
Any
Any
Any
Any
Any
Backing Pressure (mbar)
 
0.1
<10
0.1
0.1
0.1
0.1
0.1
Outlet Flange
 
NW16
NW16
NW16
NW25
NW25
NW40
NW40
Weight (lb)
 
4
5
12
43
43
54
121
Price
 
$3,362.00
$4,100.00
$7,185.00
$13,189.00
$15,875.00
$19,369.00
$36,450.00
Controller
 
RACK
NAVIGATION
RACK
NAVIGATION
RACK
NAVIGATION
RACK
NAVIGATION
RACK
NAVIGATION
RACK
NAVIGATION
N/A
Complete System Price
 
$5,174.00
$5,912.00
$8,925.00
$16,485.00
$19,185.00
$23,629.00
N/A

Turbo V-Series Navigator and Rack Controllers

The Turbo V-Series controllers are a microprocessor controlled frequency converter with self diagnostic and protection features that ensure the highest degree of reliability. The compact rack system has multifunction alphanumeric displays for pump status and error code diagnostics. The front panel has a two line dot matrix LCD display with back lighting. It displays rotational speed, current, power and bearing temperature. It also records vacuum cycles, cycle time, current cycle, and total operating hours. The Navigator controllers are microprocessor controlled frequency converters fully controllable through PC software.


Ordering Information
  V81-T V81-M V301 V551 V701 V1001 V3K-T
Turbo Pump System Complete:
Pump, Inlet Screen, Navigation Controller, 2 Main Cables, Serial Cable, Navigation Software, Bracket for Side Mounting
NW Inlet
ISO Inlet
CF Inlet
ISO Inlet
CF Inlet
9698906
9698905
9698907
9698902
9698901
9698903

9698828
9698829
9698830
9698831

9698834
9698835
9698832
9698833

9698836
9698837

9698838
9698839
9698841

9698838
9698839
9698841
Turbo Pumps Only
NW Inlet
ISO Inlet
CF Inlet
ISO Inlet
CF Inlet
9698906
9698905
9698907
9698902
9698901
9698903

9698818
9698819
9698820
9698821

9698822
9698823
9698824
9698825

9698826
9698827

9698831
9698832
9698934

9698883
9698885
Controller
Rack 110V
9698988
9698988
9699537
9699544
9698977
9699554
N/A
Pump Cable (3m)
 
9699958
9699958
9699958
9699958
9699883
Cooling Kit
Air
Water
9699290
9699823
9699290
9699823
9699299
9699347
9699314
9699347
9699314
9699347
9699315
9699337

9699348
Inlet Screen
NW
ISO
CF
9699309
9699300
9699309
9699300

9699299
9699304

9699299
9699304

9699316

9699350

9699138
9699350