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Agilent offers a broad range of turbomolecular pumps with from 46 to 7,500 liters/second pumping speed, including the Navigator and TwisTorr lines. Agilent turbopumps are optimized for high compression ratio for low base pressure, high pressure differential for high throughput and high foreline pressure. The turbopumps are oil-free, contamination free, may be operated in any position without stress on materials and have low failure rates, with typical MTTF in excess of 250,000 hours. Applications for the turbo pumps include high energy physics and research, nanotechnologies, mass spectrometry, industrial vacuum processing, and semiconductors as well as dedicated pumps for Scanning Electron Microscope (SEM) work.
Features
• State-of-the-Art MacroTorr Technology
• Designed for Very High Gas Load Operations
• Monolithic Rotors
• Highly Reliable
• Maintenance-Free Ceramic Ball Bearings
• High Speed, High Compression
• On Board Controller with Windows based Software |
|
|
 |
| V81-T |
V81-M |
V301 |
V551 |
V750 |
V850 |
V1001 |
V2300 |
V3K-T |
| Inlet Flange |
NW 40
ISO 63
CF 63 |
NW 40
ISO 63
CF 63
|
ISO 100
CF 100
ISO 160
CF 160
|
ISO 100
CF 100
ISO 160
CF 160 |
ISO 160
CF 160
|
ISO 200
CF 200
|
ISO 200
CF 200
ISO 250
|
ISO
250
CF 250 |
ISO
250
CF 250 |
| Pumping Speed, L/S |
Nitrogen - 77
Helium - 65
Hydrogen - 50 |
77
65
50 |
280
230
210 |
550
600
510 |
700
680
580 |
750
690
590 |
1050
900
920 |
2050
1800
1500 |
2050
2400
2300 |
| Compression Ratio |
Nitrogen -
7 x 10/8
Helium -
3 x 10/3
Hydrogen -
3 x 10/2
|
5 x 10/8
8 x 10/4
7 x 10/3
|
7 x 10/8
1 x 10/5
1 x 10/4
|
1 x 10/9
1 x 10/7
1 x 10/6
|
1 x 10/11
1 x 10/8
1 x 10/6
|
1 x 10/11
1 x 10/8
1 x 10/6
|
1 x 10/9
5 x 10/7
2 x 10/6
|
10/8
1 x 10/5
1 x 10/4
|
1 x 10/9
1 x 10/5
2 x 10/4
|
| Ultimate Pressure (mbar) |
10 - 9 |
10 - 9 |
10 - 10 |
10 - 10 |
10 - 10 |
10 - 10 |
10 - 10 |
10 - 10 |
10 - 9 |
| Startup Time (min) |
1 |
1 |
3 |
5 |
3 |
3 |
4 |
6 |
9 |
| Rotational Speed (rpm) |
80,000 |
80,000 |
56,000 |
42,000 |
Selectable |
Selectable |
38,000 |
Selectable |
31,000 |
| Orientation |
Any |
Any |
Any |
Any |
Any |
Any |
Any |
Any |
Any |
| Backing Pressure (mbar) |
0.1 |
<10 |
4 |
0.1 |
6 |
6 |
0.1 |
0.1 |
0.1 |
| Outlet Flange |
NW16 |
NW16 |
NW16 |
NW25 |
NW25 |
NW25 |
NW40 |
NW40 |
NW40 |
| Weight (lb) |
4 |
5 |
12 |
43 |
35 |
36 |
54 |
120 |
121 |
| Price |
$3,775.00 |
$4,675.00 |
$8,225.00 |
$14,575.00 |
$17,565.00 |
$19,125.00 |
$20,950.00 |
$34,750.00 |
$38,980.00 |
| Controller |
RACK
NAVIGATION |
RACK
NAVIGATION |
RACK
NAVIGATION |
RACK
NAVIGATION |
RACK
NAVIGATION |
RACK
NAVIGATION |
RACK
NAVIGATION |
RACK
NAVIGATION |
N/A |
| Complete System Price |
$5,736.00 |
$6,376.00 |
$9,655.00 |
$17,825.00 |
N/A |
N/A |
$25,555.00 |
N/A |
N/A |
The Turbo V-Series controllers are a microprocessor controlled frequency
converter with self diagnostic and protection features that ensure
the highest degree of reliability. The compact rack system has multifunction
alphanumeric displays for pump status and error code diagnostics.
The front panel has a two line dot matrix LCD display with back
lighting. It displays rotational speed, current, power and bearing
temperature. It also records vacuum cycles, cycle time, current
cycle, and total operating hours. The Navigator controllers are
microprocessor controlled frequency converters fully controllable
through PC software.
|
| V81-T |
V81-M |
V301 |
V551 |
V750 |
V850 |
V1001 |
V2300 |
V3K-T |
Turbo Pump
System Complete:
Pump, Inlet Screen, Navigation Controller, 2 Main Cables, Serial
Cable, Navigation Software, Bracket for Side Mounting |
NW Inlet -
9698906
ISO Inlet -
9698905
CF Inlet -
9698907
ISO Inlet -
CF Inlet -
|
9698902
9698901
9698903
|
9698828
9698829
9698830
9698831
|
9698834
9698835
9698922
9698932
|
|
|
9698838
9698839
9698841
|
|
9698882
9698884
|
| Turbo Pumps Only |
NW Inlet -
9698906
ISO Inlet -
9698905
CF Inlet -
9698907
ISO Inlet -
CF Inlet -
|
9698902
9698901
9698903
|
9698818
9698819
9698820
9698821
|
9698922
9698923
9698924
9698925
|
9698013
9698014
|
9698015
9698016
|
9698831
9698832
9698934
|
9696000
9696001
|
9698883
9698885
|
| Controller |
Rack 110V -
9698988 |
9698988
|
9699537
|
9699544
|
9699575
|
969925
|
9699554
|
9699539
|
N/A
|
| Pump Cable
(3m) |
|
|
9699958 |
9699958 |
|
|
9699958 |
|
9699883 |
| Cooling Kit |
Air -
9699290
Water -
9699823 |
9699290
9699823
|
9699299
9699347
|
9699314
9699347
|
9696503
9699347
|
9696503
9699347
|
9699315
9699337
|
9699338
|
9699348
|
| Inlet Screen |
NW -
9699309
ISO -
9699300
CF -
|
9699309
9699300
|
9699299
9699304
|
9699299
9699304
|
9699304
|
9699316
|
9699350
|
|
9699138
9699350
|
|
